CE Certification Ultra-Pure Water System for Semiconductor and Electronics Manufacturing by China Suppliers and Factory Factory, Suppliers

This electronic ultra-pure water system, manufactured in China, is essential for microelectronics, semiconductor, IC, and precision display production. It offers exceptional water quality with a resistivity of 18.2 MΩ·cm and a total organic carbon (TOC) level of less than 2 ppb. Our advanced multi-stage purification process includes pretreatment, reverse osmosis (RO), electrodeionization (EDI), polishing mixed bed, UV oxidation (185/254 nm), vacuum degassing, and ultrafiltration. As a leading factory in the industry, we ensure that our systems comply with GB/T 11446.1 EW-I / ASTM D5127-13 standards, making them ideal for applications such as lithography, etching, cleaning, and high-purity reagent preparation. Partner with us, one of the top suppliers in China, to enhance your production quality with our cutting-edge technology.

Product Description

Our Solution

Shanghai Tongjie Environmental Protection provides semiconductor-grade ultrapure water systems employing a comprehensive process flow: pretreatment + two-stage RO + EDI + polishing mixed bed + terminal ultrafiltration + degassing membrane. The produced water exhibits stable resistivity ≥18.2 MΩ·cm (at 25°C), TOC ≤1 ppb, particulate matter ≤0.05 μm, and dissolved oxygen ≤5 μg/L, fully complying with SEMI F57, ASTM E1-2018, and the first-level ultrapure water standard for the electronics industry. Equipped with 316L EP/PVDF high-purity piping, nitrogen-sealed storage tanks, and AIoT intelligent monitoring systems, these systems serve applications in 8–12-inch wafers, advanced packaging, display panels, photovoltaics, and precision electronics manufacturing.

Core Advantages

Electronic Ultra-pure water system

Excessively High Purity

18.2 MΩ·cm stable output from a dual-stage RO+EDI polishing mixed bed, with TOC ≤2 ppb, metal ions <1 ppt, and particles <0.05 μm.

Ultra-pure water system

Zero-Pollution Materials

Guaranteed high purity throughout the process with 316L EP stainless steel (Ra ≤ 0.25 μm), PVDF piping, and nitrogen-sealed double-insurance storage tanks.

Ultra-pure water treatment

Intelligent Monitoring System

Intelligent monitoring with over 40 parameters providing real-time tracking of resistivity, TOC, DO, particulates, silicon, and metal ions 24/7, automatically switching to backup system upon anomalies.

Ultra-Pure water system1

High Recovery Rate

The energy-saving system achieves a recovery rate of ≥85%, with concentrated water reused, resulting in a 30% reduction in energy consumption per ton of water.

Modular skid-mounted design enables rapid factory prefabrication and commissioning, with production operational within 15 days on-site, fully compatible with cleanroom layouts.

An ideal solution for meeting short-term or long-term decentralized water supply demands

Application Scenarios

Semiconductor Wafers: Cleaning, lithography, etching, and deposition of 8–12-inch wafers.
Advanced Packaging: Bumping, TSV, WLCSP cleaning.
Display Panel: LCD/OLED cleaning, developing, and etching.
Photovoltaic/Lithium Batteries: Silicon Wafer Cleaning, Cell Manufacturing Process.
Precision Electronics: Optical Components, Sensors, and Medical Device Cleaning.

Frequently Asked Questions

Can the water quality meet the requirements for a 12-inch advanced process?

Fully compliant. Total organic carbon (TOC) ≤2 ppb, particulate matter ≤0.1 μm, and metal ions <1 ppt, suitable for advanced processes up to 7 nm.

Does the system support 24/7 uninterrupted operation?

Standard configuration features one active unit and one standby unit with automatic switching, ensuring automatic failover to the backup unit and zero downtime risk.

Can we provide specialized designs for cleanrooms?

We offer cleanroom-grade modular units, high-purity piping systems, nitrogen sealing solutions, and customized cleanroom installation packages.

Which compliance standards does the ultrapure water system meet?

The produced water fully complies with SEMI F57, ASTM E1-2018, and the first-level ultrapure water standard for the electronics industry.

What materials are utilized to guarantee zero chemical dissolution?

Systems are configured with 316L EP stainless steel with internal surface roughness Ra ≤ 0.25 μm, premium PVDF high-purity piping, and nitrogen-sealed double-insurance vessels.

How quickly can the system be commissioned and deployed on-site?

Thanks to the modular skid-mounted prefabrication design, on-site commissioning is streamlined, enabling operational capability within 15 days of arrival.

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