Shanghai Tongjie Environmental Protection provides semiconductor-grade ultrapure water systems employing a comprehensive process flow: pretreatment + two-stage RO + EDI + polishing mixed bed + terminal ultrafiltration + degassing membrane. The produced water exhibits stable resistivity ≥18.2 MΩ·cm (at 25°C), TOC ≤1 ppb, particulate matter ≤0.05 μm, and dissolved oxygen ≤5 μg/L, fully complying with SEMI F57, ASTM E1-2018, and the first-level ultrapure water standard for the electronics industry. Equipped with 316L EP/PVDF high-purity piping, nitrogen-sealed storage tanks, and AIoT intelligent monitoring systems, these systems serve applications in 8–12-inch wafers, advanced packaging, display panels, photovoltaics, and precision electronics manufacturing.
18.2 MΩ·cm stable output from a dual-stage RO+EDI polishing mixed bed, with TOC ≤2 ppb, metal ions <1 ppt, and particles <0.05 μm.
316L EP stainless steel (Ra ≤ 0.25 μm), PVDF piping, and nitrogen-sealed double-insurance storage tanks guaranteed throughout the process.
Real-time tracking of 40+ parameters including resistivity, TOC, DO, and metal ions 24/7, with automatic backup switching.
System achieves a recovery rate of ≥85%, with concentrated water reused, resulting in a 30% reduction in energy consumption per ton.
A: Fully compliant. Total organic carbon (TOC) ≤2 ppb, particulate matter ≤0.1 μm, and metal ions <1 ppt, suitable for advanced processes up to 7 nm.
A: Standard configuration features one active unit and one standby unit with automatic switching, ensuring automatic failover to the backup unit and zero downtime risk.
A: We offer cleanroom-grade modular units, high-purity piping systems, nitrogen sealing solutions, and customized cleanroom installation packages.
A: Thanks to our modular skid-mounted design, factory prefabrication is completed quickly, and on-site commissioning typically allows production to be operational within 15 days.
A: Our systems feature a high recovery rate of ≥85%. By reusing concentrated water and optimizing the process flow, we reduce energy consumption by approximately 30% per ton of water.
A: Our systems fully comply with international standards including SEMI F57, ASTM E1-2018, and the top-tier ultrapure water standards for the electronics industry.
Modular Containerized Seawater Desalination
High-Salinity Wastewater ZLD System
OEM Precision Manufacturing
ODM Full Value Chain Innovation