ISO 9001 • CE Certified • ASTM D5127 Type E-1 Standard

ODM How Is Ultra Pure Water Produced Factory & Manufacturer

Precision Industrial Engineering Whitepaper: Advanced Multi-Stage Membrane Separation, CEDI Electrodialysis, Sub-ppb TOC Decomposition, and Global Cleanroom Water Systems by Shanghai Tongjie.

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The Science of Ultrapure Water (UPW): Theoretical Limits & Parameters

Understanding how industrial UPW surpasses standard demineralized water to reach theoretical chemical neutrality at 18.2 MΩ·cm.

Theoretical Resistivity

Pure H2O undergoes slight self-ionization into H+ and OH- ions. At 25°C, the intrinsic electrical resistivity of completely deionized water reaches the thermodynamic limit of 18.24 MΩ·cm (conductivity ≤ 0.055 μS/cm).

  • Target Resistivity (25°C): 18.18 – 18.20 MΩ·cm
  • Dissolved Sodium (Na+): < 0.001 ppb (1 ppt)
  • Chloride (Cl-): < 0.001 ppb (1 ppt)

TOC Suppression

Total Oxidizable Carbon (TOC) represents trace non-ionic organic molecules that escape standard ion exchangers. In wafer lithography and thin-film deposition, residual hydrocarbons produce microscopic surface contamination.

  • Bulk TOC Target: < 1.0 ppb (μg/L)
  • Critical Fab Rinsing: < 0.5 ppb (500 ppt)
  • Oxidation Method: 185 nm VUV Photolysis

Sub-Micron Particles

At 3nm and 2nm semiconductor nodes, colloidal silica and inert particulate matter larger than 10 nanometers bridge gate contacts, causing structural defects and devastating batch yield drops.

  • Particle Limit (≥ 20 nm): < 1 count / mL
  • Reactive Dissolved Silica: < 0.2 ppb
  • Colloidal Silica: Undetectable
17+

Years Membrane R&D

38+

Patents & Intellectual Rights

< 1 ppb

TOC Decomposition Standard

18.2

MΩ·cm Resistivity Benchmark

How Is Ultra Pure Water Produced: 5-Stage Engineering Architecture

The manufacturing sequence required to strip dissolved minerals, trace organics, dissolved gases, and biological colloids down to single-digit parts-per-trillion levels.

STAGE 01

Pretreatment & Clarification

Municipal or borehole water contains silt, natural organics, and hardness. Shanghai Tongjie utilizes automated Multi-Media Filtration (MMF), granular activated carbon (GAC) beds, sodium bisulfite dosing, and pressurized Ultrafiltration (UF) hollow-fiber membranes to consistently reduce SDI15 < 2.5.

STAGE 02

Double-Pass Reverse Osmosis

Pressurized cross-flow filtration across high-rejection polyamide thin-film composite membranes. The primary pass rejects > 99.2% of dissolved ions and minerals. The permeate is conditioned with NaOH (shifting carbonate balance to gas-impermeable bicarbonate) before the secondary pass, lowering conductivity to < 2 μS/cm.

STAGE 03

CEDI Continuous Demineralization

Continuous Electrodeionization (CEDI) replaces hazardous acid-base chemical regeneration. An electric direct-current potential continuously splits water into H+ and OH- ions to self-regenerate ion-exchange resins while flushing rejected ions, bringing water resistivity up to 15.0 – 17.5 MΩ·cm.

STAGE 04

Membrane Contact Degasification

Hydrophobic microporous hollow-fiber contactor contact membranes strip Dissolved Oxygen (DO) down to < 1 ppb and residual CO2 to < 5 ppb using dry nitrogen sweep gas and vacuum extraction. Controlling DO prevents subsurface wafer oxidation during thermal manufacturing steps.

STAGE 05

Sub-ppb Polishing Loop

Consists of 185 nm Vacuum UV photo-oxidation lamps generating hydroxyl radicals to shatter stubborn organics, non-regenerable nuclear-grade mixed-bed polishing resin, and terminal 0.05 μm polyethersulfone ultrafiltration modules operating on continuous 24/7 recirculating hydraulics.

Macro Industry Solutions & Commercial Landscape

Strategic deployment of custom-engineered UPW systems across high-yield global manufacturing environments.

Semiconductors & Microelectronics

In sub-7nm extreme ultraviolet (EUV) lithography, chemical mechanical planarization (CMP), and anisotropic silicon etching, UPW is the universal rinsing medium. Our OEM/ODM UPW skids integrate real-time boron, silica, and TOC laser spectrometers, guaranteeing that no atomic redeposition takes place on silicon substrates.

  • SEMI Standard: SEMI C35 / C79 Type E-1.3
  • Hydraulic Loop: PVDF-HP BCF Welded Piping
  • Boron Rejection: > 99.8% with selective resin

Biopharma & Injectable WFI

Biotechnology and parenteral medicine lines require sterile Purified Water (PW) and Water for Injection (WFI). Membrane-based chemical-free trains eliminate thermal still costs while fully complying with cGMP, USP ⟨645⟩, USP ⟨643⟩, and European Pharmacopoeia (EP) criteria.

  • Bacterial Endotoxin: < 0.25 EU / mL
  • Total Viable Count: < 10 CFU / 100 mL
  • Sanitization: 85°C Hot Water Sanitation (HWS)

Photovoltaics & Green Hydrogen

Next-generation N-type TOPCon, HJT solar cell manufacturing, and Proton Exchange Membrane (PEM) water electrolyzers require massive volumes of ultrapure demineralized water. Residual conductive ions in electrolyzers foul catalyst surfaces and accelerate membrane degradation.

  • Stack Water Conductivity: < 0.1 μS/cm
  • Chloride Protection: Zero pitting in Titanium anodes
  • Water Recovery Ratio: Up to 90% via High-Ratio RO

Localization Support, Factory Engineering & Compliance Assurance

Shanghai Tongjie provides global EPC contractors and industrial operators with fully traceable fabrication, validation documentation, and plug-and-play commissioning.

Certifications & Permits

CE-certified machinery directive compliance, ISO 9001, ISO 14001, and ISO 45001. We maintain Class II National Engineering Contracting qualifications for mechanical, electrical, and environmental installations.

Sanitary Material Grade

Distribution loops feature high-purity PVDF with beadless (BCF) infrared welding, or AISI 316L stainless steel orbital-welded piping with internal electro-polishing down to surface roughness Ra ≤ 0.4 μm (15 μin).

Factory Acceptance (FAT)

Pre-packaged containerized and skid-mounted skids undergo 100% full-load wet functional testing, hydrostatic pressure retention tests, and software interlock validation in our Shanghai facility before maritime shipment.

Digital SCADA & DQ/IQ/OQ

Equipped with Siemens S7-1500 or Allen-Bradley PLCs, remote SCADA industrial IoT gateways, and complete qualification portfolios (Design, Installation, and Operational Qualification) compliant with FDA 21 CFR Part 11.

Technical Roadmap: Next-Generation Ultrapure Water Innovations

Pioneering sustainable, chemical-free polishing and artificial-intelligence-driven predictive hydraulics.

AI Dynamic Digital Twins

Integration of hydrodynamic predictive algorithms monitoring transmembrane pressure (TMP), normalized permeate flux, and salt passage curves in real-time. The system predicts biofouling and scaling 15 to 20 days prior to flux deterioration, auto-optimizing Clean-In-Place (CIP) schedules.

Zero-Chemical Solid State Polishing

Eliminating non-regenerable resin disposal through Ultra-High Purity Continuous Electrodeionization (UHP-EDI). Utilizing patented multi-chamber bipolar membrane configurations, secondary-stage polishing operates continuously without spent radioactive-rated resin disposal hazards.

High-Recovery Closed Loop (95%+)

Traditional UPW facilities lose 20-30% of incoming water to RO concentrate and EDI reject streams. Shanghai Tongjie pairs Disc Tube Reverse Osmosis (DTRO) and high-pressure STRO membranes to recover 90% to 95% of effluent, redirecting recovered brine into industrial utilities and cooling towers.

Comprehensive Technical & Engineering FAQ

Direct engineering answers addressing critical design choices, sizing, metallurgy, and water chemistry.

Why is standard DI water insufficient compared to 18.2 MΩ·cm UPW for semiconductors?

Standard deionized (DI) water measures ionic resistance but overlooks non-conductive impurities. Colloidal silica, uncharged trace organics, particulate debris, and dissolved oxygen do not register on basic conductivity meters. Ultrapure Water requires comprehensive reduction of TOC (<1 ppb), silica (<0.5 ppb), dissolved oxygen (<1 ppb), and sub-20nm particles to protect sub-micron gate circuits from shorting.

How does 185 nm VUV radiation eliminate Total Oxidizable Carbon (TOC)?

While 254 nm UV light disrupts microbial DNA for disinfection, 185 nm vacuum ultraviolet light photolytically cleaves pure water molecules (H2O → H• + OH•). The resulting hydroxyl radicals are potent oxidizers that rapidly mineralize complex organics into CO2 and H2O. The ionized bicarbonate is subsequently scavenged by the downstream polishing ion exchanger.

What piping materials are mandatory for UPW delivery loops to prevent leaching?

Ultrapure water is chemically aggressive and rapidly leaches ions from standard stainless steel or PVC. For primary distribution and polishing loops, high-purity unpigmented Polyvinylidene Fluoride (PVDF-HP) assembled via Beadless Clean Flare (BCF) infrared welding is standard. For pharmaceutical WFI systems, electropolished 316L stainless steel (Ra ≤ 0.4 μm) with sanitary tri-clamp fittings is utilized to facilitate hot water sanitization.

What feed water data is required for sizing an ODM Ultrapure Water system?

We require a comprehensive water test showing Total Dissolved Solids (TDS), electrical conductivity, total hardness, alkalinity, reactive silica (SiO2), iron, manganese, SDI15, turbidity, free chlorine, and seasonal temperature variance. Additionally, the daily production demand (m³/h), peak flow rates, and specific destination industry standards (e.g., SEMI, ASTM, USP) must be identified.

How does Shanghai Tongjie guarantee rapid commissioning for overseas projects?

Our systems are pre-assembled as integrated skid units or containerized modules within our Shanghai ISO 9001 facility. Electrical conduits, internal interconnecting hydraulic piping, sensors, and PLC cabinets are completely pre-wired and wet-tested during Factory Acceptance Testing (FAT). Upon site arrival, the unit requires only external utility hookups, shortening commissioning to approximately 15 days.

How are silica and boron selectively removed from the water stream?

Boron and silica exist primarily as weakly ionized, uncharged species (boric acid B(OH)3 and silicic acid H4SiO4) at neutral pH. In our process trains, we inject high-purity sodium hydroxide (NaOH) between the first and second RO passes to elevate pH above 9.5 – 10.0. This deprotonates the compounds into charged ions (borate and silicate), increasing secondary RO membrane rejection rates beyond 99%.

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Request an Engineered Ultrapure Water System Proposal

Collaborate directly with Shanghai Tongjie’s senior membrane process engineers. Submit your raw water analysis and required delivery standards to receive a customized P&ID layout, mass balance calculation, and skid dimension schedule within 48 hours.

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