ODM Ultra-Pure Water System Semiconductor& Electronic Ultra-pure Water System Manufacturers, Manufacturer

This electronic ultra-pure water system is designed for microelectronics, semiconductor, IC, and precision display manufacturing. It delivers water with 18.2 MΩ·cm resistivity, TOC <2 ppb,  The multi-stage process includes pretreatment, RO, EDI, polishing mixed bed, UV oxidation (185/254 nm), vacuum degassing, and ultrafiltration. It meets GB/T 11446.1 EW-I / ASTM D5127-13 standards for lithography, etching, cleaning, and high-purity reagent preparation.

Product Description

Our Solution

Shanghai Tongjie Environmental Protection provides semiconductor-grade ultrapure water systems employing a comprehensive process flow: pretreatment + two-stage RO + EDI + polishing mixed bed + terminal ultrafiltration + degassing membrane. The produced water exhibits stable resistivity ≥18.2 MΩ·cm (at 25°C), TOC ≤1 ppb, particulate matter ≤0.05 μm, and dissolved oxygen ≤5 μg/L, fully complying with SEMI F57, ASTM E1-2018, and the first-level ultrapure water standard for the electronics industry. Equipped with 316L EP/PVDF high-purity piping, nitrogen-sealed storage tanks, and AIoT intelligent monitoring systems, these systems serve applications in 8–12-inch wafers, advanced packaging, display panels, photovoltaics, and precision electronics manufacturing.

Core Advantages

Electronic Ultra-pure water system

Excessively high purity

18.2 MΩ·cm stable output from a dual-stage RO+EDI polishing mixed bed, with TOC ≤2 ppb, metal ions <1 ppt, and particles <0.05 μm.

Ultra-pure water system

Zero-pollution materials with guaranteed high purity throughout the process

316L EP stainless steel (Ra ≤ 0.25 μm), PVDF piping, and nitrogen-sealed double-insurance storage tanks.

Ultra-pure water treatment

Intelligent Monitoring System

Intelligent monitoring with over 40 parameters providing real-time tracking of resistivity, TOC, DO, particulates, silicon, and metal ions 24/7, automatically switching to the backup system upon detection of anomalies.

Ultra-Pure water system1

High recovery rate

The energy-saving and cost-reduction system achieves a recovery rate of ≥85%, with concentrated water reused, resulting in a 30% reduction in energy consumption per ton of water.

Modular skid-mounted design enables rapid factory prefabrication and commissioning, with production operational within 15 days on-site, fully compatible with cleanroom layouts.
An ideal solution for meeting short-term or long-term decentralized water supply demands

Application Scenarios

Semiconductor Wafers

Cleaning, lithography, etching, and deposition of 8–12-inch wafers.

Advanced Packaging

Bumping, TSV, WLCSP cleaning.

Display Panel

LCD/OLED cleaning, developing, and etching.

Photovoltaic / Lithium Batteries

Silicon Wafer Cleaning, Cell Manufacturing Process.

Precision Electronics

Optical Components, Sensors, and Medical Device Cleaning.

Frequently Asked Questions (FAQ)

Q1 Can the water quality meet the requirements for a 12-inch advanced process?
Fully compliant. Total organic carbon (TOC) ≤2 ppb, particulate matter ≤0.1 μm, and metal ions <1 ppt, suitable for advanced processes up to 7 nm.
Q2 Does the system support 24/7 uninterrupted operation?
Standard configuration features one active unit and one standby unit with automatic switching, ensuring automatic failover to the backup unit and zero downtime risk.
Q3 Can we provide specialized designs for cleanrooms?
We offer cleanroom-grade modular units, high-purity piping systems, nitrogen sealing solutions, and customized cleanroom installation packages.
Q4 What piping materials are used to ensure zero contamination?
The system utilizes 316L EP stainless steel (Ra ≤ 0.25 μm), PVDF piping, and nitrogen-sealed double-insurance storage tanks to guarantee purity throughout the process.
Q5 What is the energy efficiency and recovery rate of this system?
The energy-saving system achieves an overall water recovery rate of ≥85%, with concentrated water reused, resulting in a 30% reduction in energy consumption per ton of water.
Q6 How long does installation and operational commissioning take on-site?
Thanks to our modular skid-mounted design, rapid factory prefabrication and pre-commissioning allow production to become fully operational within 15 days on-site.

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